Stable tin droplets for LPP EUV sources

Scopus: "A key component of EUV LPP sources is the droplet generator. Small tin droplets, when combined with a igh power laser, deliver a regenerative target with high CE. This is mandatory for long-term operation in an EUV source. The overall source stability directly correlates with the stability of the fuel delivery system. In this work, droplets are imaged directly at the irradiation site. The droplet diameter and position are extracted from recorded droplet train images. Tin droplets are successfully generated at diameters of 35-58um, with droplet velocities ranging from 8 to 12m/s. The obtained droplet sizes limit the amount of neutral atoms and residual tin at the plasma formation site. The droplet velocities lead to droplet spacings of up to 8 droplet diameters. The resulting spacing helps to minimize the plasma-droplet train interaction. The droplet generator frequency range fulfills the requirements for low power metrology tools and high power HVM sources. Stability of the droplet generator is studied at 20kHz. The droplet diameter stability presents no significant fluctuations. The lateral droplet stability is in the range of 1.8% (3σ) of the droplet diameter, so no influence on source stability is expected. The variations in drop-to-drop distance, which go up to 7.3% (3σ) can influence source stability for the case of constant laser triggering."

Stable tin droplets for LPP EUV sources

Scopus: "A key component of EUV LPP sources is the droplet generator. Small tin droplets, when combined with a igh power laser, deliver a regenerative target with high CE. This is mandatory for long-term operation in an EUV source. The overall source stability directly correlates with the stability of the fuel delivery system. In this work, droplets are imaged directly at the irradiation site. The droplet diameter and position are extracted from recorded droplet train images. Tin droplets are successfully generated at diameters of 35-58um, with droplet velocities ranging from 8 to 12m/s. The obtained droplet sizes limit the amount of neutral atoms and residual tin at the plasma formation site. The droplet velocities lead to droplet spacings of up to 8 droplet diameters. The resulting spacing helps to minimize the plasma-droplet train interaction. The droplet generator frequency range fulfills the requirements for low power metrology tools and high power HVM sources. Stability of the droplet generator is studied at 20kHz. The droplet diameter stability presents no significant fluctuations. The lateral droplet stability is in the range of 1.8% (3σ) of the droplet diameter, so no influence on source stability is expected. The variations in drop-to-drop distance, which go up to 7.3% (3σ) can influence source stability for the case of constant laser triggering."

New Alloy Can Convert Heat Directly Into Electricity

Popular Science: "A new alloy with unique properties can convert heat directly into electricity, according to researchers at the University of Minnesota. The alloy, a multiferroic composite of nickel, cobalt, manganese and tin, can be either non-magnetic and highly magnetic, depending on its temperature.

Multiferroic materials possess both magnetism and ferroelectricity, or a permanent electric polarization. Materials with both of these properties are very rare; check out this explainer from the National Institute of Standards and Technology if you’re interested in the electron orbital arrangements that cause these phenomena.

In this case, the new alloy — Ni45Co5Mn40Sn10 — undergoes a reversible phase transformation, in which one type of solid turns into another type of solid when the temperature changes, according to a news release from the University of Minnesota. Specifically, the alloy goes from being non-magnetic to highly magnetized. The temperature only needs to be raised a small amount for this to happen."

PT Timah plans to start work on tin chemical plant in Q4

Metal Bulletin: "Indonesia's PT Timah plans to build an upstream tin chemical plant in Cilegon, West Java province, to feed into its 10,000 tpy tin stabiliser plant. 'Construction is expected to start in the fourth quarter of 2011 as there are some design settings of that plant that are still under review,' said spokesman Abrun Abubakar. The new plant will..."